Skip to content
Close
Talk to an expert
Japanese
Talk to an expert
Japanese

MEMS gyroscope damping analysis

Predicting real-world MEMS gyroscope performance via coupled damping analysis

 

Solid mechanics      •      Heat solid      •      Laminar flow    •      Fluid-Structure Interaction    •      Mesh deformation

The challenge

Designing MEMS gyroscopes requires precise tuning of eigenfrequencies. However, traditional simulation methods often decouple environmental effects (anchor loss, squeeze-film damping) or use simplified "inverse-sum" approximations, leading to inaccurate quality factor (Q) predictions.

Approach with Quanscient Allsolve

We utilized Quanscient Allsolve to run a fully coupled multiphysics simulation involving mechanical, thermal, and fluid domains. The model included 2.4 million degrees of freedom and performed parametric sweeps across temperature ranges (-60°C to 120°C) and varying beam widths.

Key results

  • Accuracy: The fully coupled simulation corrected a 50% error in Q-factor prediction compared to standard inverse-sum methods.
  • Speed: Solved 2.4 million DOFs in just 10 minutes using cloud parallelization.
  • Insight: Identified squeeze-film damping as the dominant energy loss mechanism at 100 Pa.
1-2
The observed differences between fully coupled and simplified damping models show the importance of capturing real physical interactions.