Multiphysics simulation of FBARs
Fully coupled multiphysics simulation, automated geometry generation, and lateral mode analysis
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Film Bulk Acoustic Resonators (FBARs) are high-frequency piezoelectric devices used in RF filtering applications for 5G and upcoming 6G systems. High performance requires sharp resonance peaks, high quality factors, and high selectivity between transmit and receive bands.
Undesired lateral modes introduce spurious resonances and degrade filter response, and can only be fully captured using fully coupled 3D electromechanical simulations.
Quanscient Allsolve enables fully coupled multiphysics simulation by solving structural, electrostatic, and piezoelectric interactions simultaneously. A 3D harmonic analysis is used to capture lateral modes in multi-million-DoF models at GHz frequencies.
SoftMEMS and Siemens L-Edit integration supports automated geometry creation, while cloud-based parallel computation enables scalable parametric and optimization studies.
Accuracy: 3D harmonic analysis captured lateral modes while efficiently handling multi-million-DoF models at GHz frequencies.
Automation and integration: SoftMEMS and L-Edit integration streamlined geometry creation and setup.
Scalability: Cloud-based simulations distributed workloads across multiple CPUs, reducing time per frequency sweep.
Practical insights: Lateral mode identification and mitigation improved frequency response and selectivity.
Manufacturable design fidelity: Parameterized PDK-based workflows aligned simulations with fabrication constraints.