Piezoelectric devices

Influence of SI/PZT crystal orientation

A piezoelectric PZT layer grown on a monocrystalline silicon wafer is sandwiched between two electrically actuated electrodes, creating a harmonic deflection of the bilayer. The crystal orientation of both the PZT and the silicon can be changed to any direction. 

Ultrasound transducers

Large scale PMUT array 15x15

The acoustic pressure radiated by 225 PMUTs resonating at 1 MHz is simulated. A thin piezoelectric layer (PZT crystal) is electrically actuated and vibrates a thin silicon membrane that acts as an ultrasound transducers.

Microfluidics

Fluid-structure interaction

A pair of micropillars placed in a microchannel bend due to a forced inlet water velocity. Geometric nonlinearity is taken into account in the mechanical model. A Laplace formulation is used to smooth the deformed fluid mesh.

Inertial sensors

IDT finger device

The mechanical deflection of an electrostatically actuated comb drive is simulated. The nonlinear electrostatic force created by an electric potential difference is at the origin of the mechanical displacement.

Photonics

Optical waveguide modes, S-parameters

The coupling (eigen)modes between two photonic SiN waveguides in a SiO2 cladding are calculated. The waveguide is designed for optical frequencies.

RF filters

SAW device

The electric actuation of a piezoelectric IDT emits GHz-range elastic waves. The piezo-elastic physics are strongly coupled and the PZT and silicon wafer anisotropic behavior is taken into account.

Nonlinear frequency analysis

Backbone curve

Nonlinear frequency analysis (harmonic-balance) for general MEMS devices without limit on the Q-factor. No transient simulation required.

See the related publication.

Viscoelastic Structural Damper

Viscoelasticity with PMLs

A 5 MHz wave travels through two materials respectively modeled as viscoelastic (generalized Maxwell model using 18 series of spring-dashpot branches) and elastic. PMLs surround the geometry to let the waves leave without artificial reflections.

Inertial sensors

Mode shapes of MEMS capacitive accelerometer

The first six mode shapes of the moving parts of the MEMS capacitive accelerometer are obtained. The four corners of the serpentine springs are anchored for the eigen mode analysis.

MEMS drawing import

GDS2 format drag and drop

Use your existing GDS2 files or draw your MEMS in the widely-used Klayout software then export as GDS2. Drag and drop the file into Quanscient Allsolve to automatically show in 3D your MEMS geometry.